$Emerging Maskless Nanolithography Based on Novel Diffraction Gratings$
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Emerging Maskless Nanolithography Based on Novel Diffraction Gratings

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Bibliographic Details
Main Authors:	Cheng, Guanxiao, Yang, Yong, Hu, Chao, Xu, Ping, Song, Helun, Xing, Tingwen, Meng, Max Q.-H.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/24505
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