APA (7th ed.) Citation

Cheng, G., Yang, Y., Hu, C., Xu, P., Song, H., Xing, T., & Meng, M. Q. (2011). Emerging Maskless Nanolithography Based on Novel Diffraction Gratings. IntechOpen. https://doi.org/10.5772/22265

Chicago Style (17th ed.) Citation

Cheng, Guanxiao, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing, and Max Q.-H Meng. Emerging Maskless Nanolithography Based on Novel Diffraction Gratings. IntechOpen, 2011. https://doi.org/10.5772/22265.

MLA (9th ed.) Citation

Cheng, Guanxiao, et al. Emerging Maskless Nanolithography Based on Novel Diffraction Gratings. IntechOpen, 2011. https://doi.org/10.5772/22265.