DUV Interferometry for Micro and Nanopatterned Surfaces

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DUV Interferometry for Micro and Nanopatterned Surfaces

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Bibliographic Details
Main Authors:	Soppera, Olivier, Dirani, Ali, Stehlin, Fabrice, Ridaoui, Hassan, Spangenberg, Arnaud, Wieder, Fernand, Roucoules, Vincent
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/24501
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