DUV Interferometry for Micro and Nanopatterned Surfaces
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| Main Authors: | , , , , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2011
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| Online Access: | https://www.intechopen.com/chapters/24501 |
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| _version_ | 1839562648643960832 |
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| author | Soppera, Olivier Dirani, Ali Stehlin, Fabrice Ridaoui, Hassan Spangenberg, Arnaud Wieder, Fernand Roucoules, Vincent |
| author_facet | Soppera, Olivier Dirani, Ali Stehlin, Fabrice Ridaoui, Hassan Spangenberg, Arnaud Wieder, Fernand Roucoules, Vincent |
| author_sort | Soppera, Olivier |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/20896 |
| first_indexed | 2025-08-04T21:40:51Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-24501</identifier><datestamp>2011-12-02</datestamp>
<dc:title>DUV Interferometry for Micro and Nanopatterned Surfaces</dc:title>
<dc:creator>Olivier Soppera</dc:creator>
<dc:creator>Ali Dirani</dc:creator>
<dc:creator>Fabrice Stehlin</dc:creator>
<dc:creator>Hassan Ridaoui</dc:creator>
<dc:creator>Arnaud Spangenberg</dc:creator>
<dc:creator>Fernand Wieder</dc:creator>
<dc:creator>Vincent Roucoules</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2011-12-02</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/24501</dc:identifier>
<dc:identifier>doi:10.5772/20896</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-602-7</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/334 ; Recent Advances in Nanofabrication Techniques and Applications</dc:source>
</oai_dc:dc> |
| id | InTech-24501 |
| institution | Matheson Library |
| isbn | 978-953-307-602-7 |
| language | English |
| last_indexed | 2025-08-04T21:40:51Z |
| publishDate | 2011 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-245012011-12-02 DUV Interferometry for Micro and Nanopatterned Surfaces Olivier Soppera Ali Dirani Fabrice Stehlin Hassan Ridaoui Arnaud Spangenberg Fernand Wieder Vincent Roucoules Physical Sciences, Engineering and Technology None IntechOpen 2011-12-02 Chapter, Part Of Book https://www.intechopen.com/chapters/24501 doi:10.5772/20896 en ISBN:978-953-307-602-7 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/334 ; Recent Advances in Nanofabrication Techniques and Applications |
| spellingShingle | Physical Sciences, Engineering and Technology Soppera, Olivier Dirani, Ali Stehlin, Fabrice Ridaoui, Hassan Spangenberg, Arnaud Wieder, Fernand Roucoules, Vincent DUV Interferometry for Micro and Nanopatterned Surfaces |
| title | DUV Interferometry for Micro and Nanopatterned Surfaces |
| title_full | DUV Interferometry for Micro and Nanopatterned Surfaces |
| title_fullStr | DUV Interferometry for Micro and Nanopatterned Surfaces |
| title_full_unstemmed | DUV Interferometry for Micro and Nanopatterned Surfaces |
| title_short | DUV Interferometry for Micro and Nanopatterned Surfaces |
| title_sort | duv interferometry for micro and nanopatterned surfaces |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/24501 |
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