Soppera, O., Dirani, A., Stehlin, F., Ridaoui, H., Spangenberg, A., Wieder, F., & Roucoules, V. (2011). DUV Interferometry for Micro and Nanopatterned Surfaces. IntechOpen. https://doi.org/10.5772/20896
Chicago Style (17th ed.) CitationSoppera, Olivier, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder, and Vincent Roucoules. DUV Interferometry for Micro and Nanopatterned Surfaces. IntechOpen, 2011. https://doi.org/10.5772/20896.
MLA (9th ed.) CitationSoppera, Olivier, et al. DUV Interferometry for Micro and Nanopatterned Surfaces. IntechOpen, 2011. https://doi.org/10.5772/20896.
Warning: These citations may not always be 100% accurate.