Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition

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Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition

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Bibliografiska uppgifter
Huvudupphovsmän:	Okada, Makoto, Matsui, Shinji
Materialtyp:	Elektronisk Bokavsnitt
Språk:	engelska
Publicerad:	IntechOpen 2011
Ämnen:	Physical Sciences, Engineering and Technology
Länkar:	https://www.intechopen.com/chapters/24496
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

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