Okada, M., & Matsui, S. (2011). Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition. IntechOpen. https://doi.org/10.5772/21483
Chicago Style (17th ed.) CitationOkada, Makoto, and Shinji Matsui. Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition. IntechOpen, 2011. https://doi.org/10.5772/21483.
MLA (9th ed.) CitationOkada, Makoto, and Shinji Matsui. Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition. IntechOpen, 2011. https://doi.org/10.5772/21483.
Warning: These citations may not always be 100% accurate.