Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam
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| Autores principales: | , , |
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| Formato: | Electrónico Capítulo de libro |
| Lenguaje: | inglés |
| Publicado: |
IntechOpen
2011
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| Materias: | |
| Acceso en línea: | https://www.intechopen.com/chapters/24491 |
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| _version_ | 1839562615863377920 |
|---|---|
| author | Zhang, Jianwu Wang, Zhongping Zhang, Zengming |
| author_facet | Zhang, Jianwu Wang, Zhongping Zhang, Zengming |
| author_sort | Zhang, Jianwu |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/21007 |
| first_indexed | 2025-08-04T21:40:20Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-24491</identifier><datestamp>2011-12-02</datestamp>
<dc:title>Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam</dc:title>
<dc:creator>Jianwu Zhang</dc:creator>
<dc:creator>Zhongping Wang</dc:creator>
<dc:creator>Zengming Zhang</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2011-12-02</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/24491</dc:identifier>
<dc:identifier>doi:10.5772/21007</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-602-7</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/334 ; Recent Advances in Nanofabrication Techniques and Applications</dc:source>
</oai_dc:dc> |
| id | InTech-24491 |
| institution | Matheson Library |
| isbn | 978-953-307-602-7 |
| language | English |
| last_indexed | 2025-08-04T21:40:20Z |
| publishDate | 2011 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-244912011-12-02 Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam Jianwu Zhang Zhongping Wang Zengming Zhang Physical Sciences, Engineering and Technology None IntechOpen 2011-12-02 Chapter, Part Of Book https://www.intechopen.com/chapters/24491 doi:10.5772/21007 en ISBN:978-953-307-602-7 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/334 ; Recent Advances in Nanofabrication Techniques and Applications |
| spellingShingle | Physical Sciences, Engineering and Technology Zhang, Jianwu Wang, Zhongping Zhang, Zengming Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam |
| title | Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam |
| title_full | Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam |
| title_fullStr | Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam |
| title_full_unstemmed | Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam |
| title_short | Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam |
| title_sort | atom lithography fabricating arrays of silicon microstructures using self assembled monolayer resist and metastable helium beam |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/24491 |
| work_keys_str_mv | AT zhangjianwu atomlithographyfabricatingarraysofsiliconmicrostructuresusingselfassembledmonolayerresistandmetastableheliumbeam AT wangzhongping atomlithographyfabricatingarraysofsiliconmicrostructuresusingselfassembledmonolayerresistandmetastableheliumbeam AT zhangzengming atomlithographyfabricatingarraysofsiliconmicrostructuresusingselfassembledmonolayerresistandmetastableheliumbeam |