APA (7th ed.) Citation

Zhang, J., Wang, Z., & Zhang, Z. (2011). Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam. IntechOpen. https://doi.org/10.5772/21007

Chicago Style (17th ed.) Citation

Zhang, Jianwu, Zhongping Wang, and Zengming Zhang. Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam. IntechOpen, 2011. https://doi.org/10.5772/21007.

MLA (9th ed.) Citation

Zhang, Jianwu, et al. Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam. IntechOpen, 2011. https://doi.org/10.5772/21007.