Hosaka, S. (2011). Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch. IntechOpen. https://doi.org/10.5772/20711
Chicago Style (17th ed.) CitationHosaka, Sumio. Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch. IntechOpen, 2011. https://doi.org/10.5772/20711.
MLA (9th ed.) CitationHosaka, Sumio. Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch. IntechOpen, 2011. https://doi.org/10.5772/20711.
Warning: These citations may not always be 100% accurate.