Gas Safety for TFT-LCD Manufacturing

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Bibliographic Details
Main Authors: Ngai, Eugene Y., Chen, Jenq-Renn
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2011
Subjects:
Online Access:https://www.intechopen.com/chapters/24448
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author Ngai, Eugene Y.
Chen, Jenq-Renn
author_facet Ngai, Eugene Y.
Chen, Jenq-Renn
author_sort Ngai, Eugene Y.
collection InTech Open eBooks
description None
doi_str_mv 10.5772/29226
first_indexed 2025-08-04T22:09:48Z
format Electronic
Book Chapter
fullrecord <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-24448</identifier><datestamp>2011-11-30</datestamp> <dc:title>Gas Safety for TFT-LCD Manufacturing</dc:title> <dc:creator>Eugene Y. Ngai</dc:creator> <dc:creator>Jenq-Renn Chen</dc:creator> <dc:subject>Physical Sciences, Engineering and Technology</dc:subject> <dc:description>None</dc:description> <dc:publisher>IntechOpen</dc:publisher> <dc:date>2011-11-30</dc:date> <dc:type>Chapter, Part Of Book</dc:type> <dc:identifier>https://www.intechopen.com/chapters/24448</dc:identifier> <dc:identifier>doi:10.5772/29226</dc:identifier> <dc:language>en</dc:language> <dc:relation>ISBN:978-953-307-899-1</dc:relation> <dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights> <dc:source>https://www.intechopen.com/books/847 ; Features of Liquid Crystal Display Materials and Processes</dc:source> </oai_dc:dc>
id InTech-24448
institution Matheson Library
isbn 978-953-307-899-1
language English
last_indexed 2025-08-04T22:09:48Z
publishDate 2011
publisher IntechOpen
record_format intech
spelling InTech-244482011-11-30 Gas Safety for TFT-LCD Manufacturing Eugene Y. Ngai Jenq-Renn Chen Physical Sciences, Engineering and Technology None IntechOpen 2011-11-30 Chapter, Part Of Book https://www.intechopen.com/chapters/24448 doi:10.5772/29226 en ISBN:978-953-307-899-1 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/847 ; Features of Liquid Crystal Display Materials and Processes
spellingShingle Physical Sciences, Engineering and Technology
Ngai, Eugene Y.
Chen, Jenq-Renn
Gas Safety for TFT-LCD Manufacturing
title Gas Safety for TFT-LCD Manufacturing
title_full Gas Safety for TFT-LCD Manufacturing
title_fullStr Gas Safety for TFT-LCD Manufacturing
title_full_unstemmed Gas Safety for TFT-LCD Manufacturing
title_short Gas Safety for TFT-LCD Manufacturing
title_sort gas safety for tft lcd manufacturing
topic Physical Sciences, Engineering and Technology
url https://www.intechopen.com/chapters/24448
work_keys_str_mv AT ngaieugeney gassafetyfortftlcdmanufacturing
AT chenjenqrenn gassafetyfortftlcdmanufacturing