APA (7th ed.) Citation

Sekiguchi, A. (2011). Approach to EUV Lithography Simulation. IntechOpen. https://doi.org/10.5772/23533

Chicago Style (17th ed.) Citation

Sekiguchi, Atsushi. Approach to EUV Lithography Simulation. IntechOpen, 2011. https://doi.org/10.5772/23533.

MLA (9th ed.) Citation

Sekiguchi, Atsushi. Approach to EUV Lithography Simulation. IntechOpen, 2011. https://doi.org/10.5772/23533.

Warning: These citations may not always be 100% accurate.