Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography
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Main Authors: | Motogaito, Atsushi, Hiramatsu, Kazumasa |
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Format: | Electronic Book Chapter |
Language: | English |
Published: |
IntechOpen
2011
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Online Access: | https://www.intechopen.com/chapters/23484 |
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