Producing Poly-Silicon from Silane in a Fluidized Bed Reactor

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Producing Poly-Silicon from Silane in a Fluidized Bed Reactor

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Bibliographic Details
Main Authors:	Ydstie, B. Erik, Du, Juan
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/22416
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