Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys

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Main Author: Lakhotkin, Yu. V.
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2011
Subjects:
Online Access:https://www.intechopen.com/chapters/21858
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author Lakhotkin, Yu. V.
author_facet Lakhotkin, Yu. V.
author_sort Lakhotkin, Yu. V.
collection InTech Open eBooks
description None
doi_str_mv 10.5772/20281
first_indexed 2025-08-04T21:37:45Z
format Electronic
Book Chapter
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id InTech-21858
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isbn 978-953-307-563-1
language English
last_indexed 2025-08-04T21:37:45Z
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spelling InTech-218582011-11-02 Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys Yu. V. Lakhotkin Physical Sciences, Engineering and Technology None IntechOpen 2011-11-02 Chapter, Part Of Book https://www.intechopen.com/chapters/21858 doi:10.5772/20281 en ISBN:978-953-307-563-1 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/297 ; Thermodynamics - Interaction Studies - Solids, Liquids and Gases
spellingShingle Physical Sciences, Engineering and Technology
Lakhotkin, Yu. V.
Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys
title Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys
title_full Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys
title_fullStr Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys
title_full_unstemmed Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys
title_short Thermodynamic Aspects of CVD Crystallization of Refractory Metals and Their Alloys
title_sort thermodynamic aspects of cvd crystallization of refractory metals and their alloys
topic Physical Sciences, Engineering and Technology
url https://www.intechopen.com/chapters/21858
work_keys_str_mv AT lakhotkinyuv thermodynamicaspectsofcvdcrystallizationofrefractorymetalsandtheiralloys