Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films

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Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films

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Bibliographic Details
Main Authors:	Hoffmann, P., Fainer, N., Kosinova, M., Baake, O., Ensinger, W.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/21157
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