Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts

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Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts

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Bibliographic Details
Main Authors:	Gupta, Sanjeev Kumar, Akhtar, Jamil
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/21145
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