Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry

Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry

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Bibliographic Details
Main Author: Snyman, Lukas W.
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2011
Subjects:
Physical Sciences, Engineering and Technology
Online Access:https://www.intechopen.com/chapters/20474
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