Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers
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| Main Authors: | , |
|---|---|
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2011
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/17726 |
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| _version_ | 1839562557937942528 |
|---|---|
| author | Li Liu, Xianming |
| author_facet | Li Liu, Xianming |
| author_sort | Li |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/23438 |
| first_indexed | 2025-08-04T21:39:24Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-17726</identifier><datestamp>2011-07-27</datestamp>
<dc:title>Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers</dc:title>
<dc:creator>Li</dc:creator>
<dc:creator>Xianming Liu</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2011-07-27</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/17726</dc:identifier>
<dc:identifier>doi:10.5772/23438</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-587-7</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by-nc-sa/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/332 ; Crystalline Silicon - Properties and Uses</dc:source>
</oai_dc:dc> |
| id | InTech-17726 |
| institution | Matheson Library |
| isbn | 978-953-307-587-7 |
| language | English |
| last_indexed | 2025-08-04T21:39:24Z |
| publishDate | 2011 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-177262011-07-27 Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers Li Xianming Liu Physical Sciences, Engineering and Technology None IntechOpen 2011-07-27 Chapter, Part Of Book https://www.intechopen.com/chapters/17726 doi:10.5772/23438 en ISBN:978-953-307-587-7 https://creativecommons.org/licenses/by-nc-sa/3.0/ https://www.intechopen.com/books/332 ; Crystalline Silicon - Properties and Uses |
| spellingShingle | Physical Sciences, Engineering and Technology Li Liu, Xianming Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers |
| title | Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers |
| title_full | Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers |
| title_fullStr | Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers |
| title_full_unstemmed | Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers |
| title_short | Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers |
| title_sort | infrared spectroscopic ellipsometry for ion implanted silicon wafers |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/17726 |
| work_keys_str_mv | AT li infraredspectroscopicellipsometryforionimplantedsiliconwafers AT liuxianming infraredspectroscopicellipsometryforionimplantedsiliconwafers |