Baginsky, I. L., & Kostsov, E. G. (2011). MEMS Based on Thin Ferroelectric Layers. IntechOpen. https://doi.org/10.5772/17539
Chicago Style (17th ed.) CitationBaginsky, Igor L., and Edward G. Kostsov. MEMS Based on Thin Ferroelectric Layers. IntechOpen, 2011. https://doi.org/10.5772/17539.
MLA (9th ed.) CitationBaginsky, Igor L., and Edward G. Kostsov. MEMS Based on Thin Ferroelectric Layers. IntechOpen, 2011. https://doi.org/10.5772/17539.
Warning: These citations may not always be 100% accurate.