Strength Reliability of Micro Polycrystalline Silicon Structure
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| Main Authors: | , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2011
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/15871 |
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| _version_ | 1839561838754267136 |
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| author | Hamada, Shigeru Hasizume, Kenji Nakaura, Hiroyuki Sugimoto, Yoshihide |
| author_facet | Hamada, Shigeru Hasizume, Kenji Nakaura, Hiroyuki Sugimoto, Yoshihide |
| author_sort | Hamada, Shigeru |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/17032 |
| first_indexed | 2025-08-04T21:27:59Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-15871</identifier><datestamp>2011-06-09</datestamp>
<dc:title>Strength Reliability of Micro Polycrystalline Silicon Structure</dc:title>
<dc:creator>Shigeru Hamada</dc:creator>
<dc:creator>Kenji Hasizume</dc:creator>
<dc:creator>Hiroyuki Nakaura</dc:creator>
<dc:creator>Yoshihide Sugimoto</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2011-06-09</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/15871</dc:identifier>
<dc:identifier>doi:10.5772/17032</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-170-1</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by-nc-sa/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/162 ; Microsensors</dc:source>
</oai_dc:dc> |
| id | InTech-15871 |
| institution | Matheson Library |
| isbn | 978-953-307-170-1 |
| language | English |
| last_indexed | 2025-08-04T21:27:59Z |
| publishDate | 2011 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-158712011-06-09 Strength Reliability of Micro Polycrystalline Silicon Structure Shigeru Hamada Kenji Hasizume Hiroyuki Nakaura Yoshihide Sugimoto Physical Sciences, Engineering and Technology None IntechOpen 2011-06-09 Chapter, Part Of Book https://www.intechopen.com/chapters/15871 doi:10.5772/17032 en ISBN:978-953-307-170-1 https://creativecommons.org/licenses/by-nc-sa/3.0/ https://www.intechopen.com/books/162 ; Microsensors |
| spellingShingle | Physical Sciences, Engineering and Technology Hamada, Shigeru Hasizume, Kenji Nakaura, Hiroyuki Sugimoto, Yoshihide Strength Reliability of Micro Polycrystalline Silicon Structure |
| title | Strength Reliability of Micro Polycrystalline Silicon Structure |
| title_full | Strength Reliability of Micro Polycrystalline Silicon Structure |
| title_fullStr | Strength Reliability of Micro Polycrystalline Silicon Structure |
| title_full_unstemmed | Strength Reliability of Micro Polycrystalline Silicon Structure |
| title_short | Strength Reliability of Micro Polycrystalline Silicon Structure |
| title_sort | strength reliability of micro polycrystalline silicon structure |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/15871 |
| work_keys_str_mv | AT hamadashigeru strengthreliabilityofmicropolycrystallinesiliconstructure AT hasizumekenji strengthreliabilityofmicropolycrystallinesiliconstructure AT nakaurahiroyuki strengthreliabilityofmicropolycrystallinesiliconstructure AT sugimotoyoshihide strengthreliabilityofmicropolycrystallinesiliconstructure |