Nanocomposite Films Deposition by means of Various Filtered Vacuum Arc Systems

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Nanocomposite Films Deposition by means of Various Filtered Vacuum Arc Systems

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Bibliographic Details
Main Authors:	Lee, Seunghun, Kim, Do-Geun, Svadkovski, Igor, Kim, Jong-Kuk
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/14376
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