Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function
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| Main Author: | |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2011
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/14007 |
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| _version_ | 1839566189845544960 |
|---|---|
| author | Suzuki, Kunihiro |
| author_facet | Suzuki, Kunihiro |
| author_sort | Suzuki, Kunihiro |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/14539 |
| first_indexed | 2025-08-04T22:37:08Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-14007</identifier><datestamp>2011-02-28</datestamp>
<dc:title>Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function</dc:title>
<dc:creator>Kunihiro Suzuki</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2011-02-28</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/14007</dc:identifier>
<dc:identifier>doi:10.5772/14539</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-691-1</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by-nc-sa/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/1485 ; Applications of Monte Carlo Method in Science and Engineering</dc:source>
</oai_dc:dc> |
| id | InTech-14007 |
| institution | Matheson Library |
| isbn | 978-953-307-691-1 |
| language | English |
| last_indexed | 2025-08-04T22:37:08Z |
| publishDate | 2011 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-140072011-02-28 Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function Kunihiro Suzuki Physical Sciences, Engineering and Technology None IntechOpen 2011-02-28 Chapter, Part Of Book https://www.intechopen.com/chapters/14007 doi:10.5772/14539 en ISBN:978-953-307-691-1 https://creativecommons.org/licenses/by-nc-sa/3.0/ https://www.intechopen.com/books/1485 ; Applications of Monte Carlo Method in Science and Engineering |
| spellingShingle | Physical Sciences, Engineering and Technology Suzuki, Kunihiro Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function |
| title | Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function |
| title_full | Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function |
| title_fullStr | Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function |
| title_full_unstemmed | Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function |
| title_short | Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function |
| title_sort | monte carlo simulation for ion implantation profiles amorphous layer thickness formed by the ion implantation and database based on pearson function |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/14007 |
| work_keys_str_mv | AT suzukikunihiro montecarlosimulationforionimplantationprofilesamorphouslayerthicknessformedbytheionimplantationanddatabasebasedonpearsonfunction |