Sputtering by particle bombardment III : characteristics of sputtered particles, technical applicationsm /
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| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer-Verlag,
c1991.
|
| Series: | Topics in applied physics ;
64 |
| Subjects: | |
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Table of Contents:
- 1. Physical sputtering of single-element solids
- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
- 3. Characteristics of sputtered particles, technical applications.