Loading…
Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 /
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
1988.
|
| Series: | American Vacuum Society series ;
4 AIP conference proceedings. no. 167. |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Physical Description: | 388 p. : ill. |
|---|---|
| ISBN: | 0883183676 |