American Institute of Physics & Rubloff, G. W. (1988). Deposition and growth: Limits for microelectronics, Anaheim, CA, 1987. American Institute of Physics.
Chicago Style (17th ed.) CitationAmerican Institute of Physics and G. W. Rubloff. Deposition and Growth: Limits for Microelectronics, Anaheim, CA, 1987. New York: American Institute of Physics, 1988.
MLA (9th ed.) CitationAmerican Institute of Physics and G. W. Rubloff. Deposition and Growth: Limits for Microelectronics, Anaheim, CA, 1987. American Institute of Physics, 1988.
Warning: These citations may not always be 100% accurate.