APA (7th ed.) Citation

Elliott, D. J. (1986). Microlithography: Process technology for IC fabrication. McGraw-Hill.

Chicago Style (17th ed.) Citation

Elliott, David J. Microlithography: Process Technology for IC Fabrication. New York: McGraw-Hill, 1986.

MLA (9th ed.) Citation

Elliott, David J. Microlithography: Process Technology for IC Fabrication. McGraw-Hill, 1986.