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Introduction to microlithography : theory, materials, and processing /
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| Corporate Authors: | , |
|---|---|
| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Washington, D.C. :
The Society,
1983.
|
| Series: | ACS symposium series ;
219 |
| Subjects: | |
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MARC
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| 245 | 0 | 0 | |a Introduction to microlithography : |b theory, materials, and processing / |c L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. |
| 260 | 0 | |a Washington, D.C. : |b The Society, |c 1983. | |
| 300 | |a ix, 363 p. : |b ill. | ||
| 440 | 0 | |a ACS symposium series ; |v 219 | |
| 650 | 0 | |a Microlithography. | |
| 650 | 0 | |a Photoresists. | |
| 650 | 0 | |a Plasma etching. | |
| 700 | 1 | 0 | |a Thompson, L. F., |d 1944- |
| 700 | 1 | 0 | |a Willson, C. G. |q (C. Grant), |d 1939- |
| 700 | 1 | 0 | |a Bowden, M. J., |d 1943- |
| 710 | 2 | 0 | |a American Chemical Society. |b Division of Organic Coatings and Plastics Chemistry. |
| 710 | 2 | 0 | |a American Chemical Society. |b Meeting |n (185th : |d 1983 : |c Seattle, Wash.) |
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