APA (7th ed.) Citation

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, Thompson, L. F., Willson, C. G., & Bowden, M. J. (1983). Introduction to microlithography: Theory, materials, and processing. The Society.

Chicago Style (17th ed.) Citation

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, L. F. Thompson, C. G. Willson, and M. J. Bowden. Introduction to Microlithography: Theory, Materials, and Processing. Washington, D.C.: The Society, 1983.

MLA (9th ed.) Citation

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, et al. Introduction to Microlithography: Theory, Materials, and Processing. The Society, 1983.