Sputtering by particle bombardment III : characteristics of sputtered particles, technical applicationsm /

Saved in:
Bibliographic Details
Other Authors: Behrisch, Rainer, Andersen, Hans Henrik
Format: Book
Language:English
Published: Berlin : Springer-Verlag, c1991.
Series:Topics in applied physics ; 64
Subjects:
Sputtering (Physics)
Surfaces (Physics) > Effect of radiation on.
Solids > Effect of radiation on
Tags: Add Tag
No Tags, Be the first to tag this record!

MARC

LEADER 00000cam a2200000 4500
001 00013013
003 PWmBRO
005 20240602102759.0
008 940317s1991 wb a b 001 0 eng
020 |a 3540534288 
245 0 0 |a Sputtering by particle bombardment III :  |b characteristics of sputtered particles, technical applicationsm /  |c edited by R. Behrisch and K. Wittmaack. 
260 0 |a Berlin :  |b Springer-Verlag,  |c c1991. 
300 |a xii, 410 p. :  |b ill. 
440 0 |a Topics in applied physics ;  |v 64 
505 0 |a 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications. 
650 0 |a Sputtering (Physics) 
650 0 |a Surfaces (Physics)  |x Effect of radiation on. 
650 0 |a Solids  |x Effect of radiation on 
700 1 0 |a Behrisch, Rainer. 
700 1 0 |a Andersen, Hans Henrik. 
740 0 1 |a Particle bombardment. 
942 |2 ddc 
952 |0 0  |1 127  |4 0  |6 530_410000000000000_S772  |7 0  |8 MN  |9 85969  |a ML015  |b ML015  |c MN  |d 2024-06-02  |l 0  |o 530.41 S772  |p 092490  |r 2018-03-24 00:00:00  |w 2018-03-24  |y BK 
999 |c 64899  |d 64899 

Similar Items