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Sputtering by particle bombardment III : characteristics of sputtered particles, technical applicationsm /

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書誌詳細
その他の著者:	Behrisch, Rainer, Andersen, Hans Henrik
フォーマット:	図書
言語:	英語
出版事項:	Berlin : Springer-Verlag, c1991.
シリーズ:	Topics in applied physics ; 64
主題:	Sputtering (Physics) Surfaces (Physics) > Effect of radiation on. Solids > Effect of radiation on
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

MARC


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020			\|a 3540534288
245	0	0	\|a Sputtering by particle bombardment III : \|b characteristics of sputtered particles, technical applicationsm / \|c edited by R. Behrisch and K. Wittmaack.
260	0		\|a Berlin : \|b Springer-Verlag, \|c c1991.
300			\|a xii, 410 p. : \|b ill.
440		0	\|a Topics in applied physics ; \|v 64
505	0		\|a 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.
650		0	\|a Sputtering (Physics)
650		0	\|a Surfaces (Physics) \|x Effect of radiation on.
650		0	\|a Solids \|x Effect of radiation on
700	1	0	\|a Behrisch, Rainer.
700	1	0	\|a Andersen, Hans Henrik.
740	0	1	\|a Particle bombardment.
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