APA (7th ed.) Citation

Behrisch, R., & Andersen, H. H. (1991). Sputtering by particle bombardment III: Characteristics of sputtered particles, technical applicationsm. Springer-Verlag.

Chicago Style (17th ed.) Citation

Behrisch, Rainer, and Hans Henrik Andersen. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applicationsm. Berlin: Springer-Verlag, 1991.

MLA (9th ed.) Citation

Behrisch, Rainer, and Hans Henrik Andersen. Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applicationsm. Springer-Verlag, 1991.