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    Visible to Near-Infrared Light Integrated Photonic Components on PECVD and LPCVD SiN Platform

    Visible to Near-Infrared Light Integrated Photonic Components on PECVD and LPCVD SiN Platform by Sen Yang, Zuoqin Ding, Xiao Li, Xiao Luo, Shuhua Zhai, Xiujun Zheng, Bo Wang, He Li, Zhuo Deng, Qianshi Wang, Sarp Kerman, Chang Chen

    Published 2024-01-01

    In this paper, we present our process design kits (PDKs) component performances for different wavelengths in the visible to near-infrared (VIS-NIR) range on Shanghai Industrial μTechnology Research Institute's (SITRI's) 200 mm silicon nitride (SiN) photonics platform...

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