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    An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam

    An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam von Xiao-Yong Fang, Ang Li, Er-Qi Tu, Bo Peng, Zhi-Ran Yi, Wen-Ming Zhang

    Veröffentlicht 2025-09-01

    Micro-electromechanical systems (MEMS) micromirrors are preferred actuators in the field of light beam steering. Electrostatic micromirrors have gained vital attention due to their simple and compact structure. Among performance characteristics, the large field of view (FOV) and high structural reli...

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