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    An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam

    An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam by Xiao-Yong Fang, Ang Li, Er-Qi Tu, Bo Peng, Zhi-Ran Yi, Wen-Ming Zhang

    Published 2025-09-01
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