Search Results - Yunchu Yu

  • Showing 1 - 1 results of 1
Refine Results
  1. 1
    High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process

    High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process by Ke Zhang, Yunchu Yu, Nanfei Zhu, Senlin Zhang, Jie Sun, Shijin Ding, David Wei Zhang

    Published 2025-06-01

    Silicon photonics has emerged as critical for advancing photonic integrated circuits (PICs), but waveguide losses, primarily resulting from sidewall roughness, remain a primary challenge. In this work, we demonstrate a tri-layer hard mask etching process that produces strip silicon waveguides with p...

    Full description

    Get full text
    Article

    Save to List
    Saved in:

Search Tools: