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    Highly Efficient Digitized Quasi-3D Photolithography Based on a Modified Golomb Coding via DMD Laser Direct Writing by Hui Wang, Zhe Huang, Yanting Shen, Shangying Zhou

    Published 2025-06-01

    Three-dimensional (3D) photolithography has found wide applications in microelectronics, optoelectronics, biomedicine, etc. Traditionally, it requires repetitive exposure and developing cycles. Meanwhile, a laser direct writing (LDW) system with a digital micromirror device (DMD) enables high-speed...

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