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    Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy 著者: Hao Hong, Xin Lei, Jiangtao Wei, Wenjun Tang, Minjie Ye, Jianwen Sun, Guoqi Zhang, Pasqualina M. Sarro, Zewen Liu

    出版事項 2025-06-01

    Abstract The three-step wet etching (TSWE) method has been proven to be a promising technique for fabricating silicon nanopores. Despite its potential, one of the bottlenecks of this method is the precise control of the silicon etching and etch-stop, which results in obtaining a well-defined nanopor...

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