Search Results - V. V. Jarski

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    TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT

    TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT by I. V. Dainiak, V. V. Jarski, S. E. Karpovich

    Published 2019-06-01
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    PRECISION MOTION SYSTEMS FOR EQUIPMENT OF ELECTRONIC TECHNICS MANUFACTURING

    PRECISION MOTION SYSTEMS FOR EQUIPMENT OF ELECTRONIC TECHNICS MANUFACTURING by S. E. Karpovich, V. V. Jarski, I. V. Dainiak

    Published 2019-06-01
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