Search Results - V. V. Emelyanov
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Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride by V. V. Emelyanov
Published 2023-06-01
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Multilayer Metallization Systems of Submicron Integrated Circuits by V. V. Emelyanov
Published 2022-12-01
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Formation of Functional Silicon Nitride Layers by Selective Plasmochemical Etching by V. V. Emelyanov
Published 2022-03-01
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