Search Results - V. A. Zaikou

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    GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY

    GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY by I. M. Klimovich, V. N. Kuleshov, V. A. Zaikou, A. P. Burmakou, F. F. Komarov, O. R. Ludchik

    Published 2015-12-01
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