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    Finite Element Modelling of Atomic Force Microscope Cantilever Beams with Uncertainty in Material and Dimensional Parameters

    Finite Element Modelling of Atomic Force Microscope Cantilever Beams with Uncertainty in Material and Dimensional Parameters by Bin WANG, Xiao WU, Tat-Hean GAN, Alexis RUSINEK

    Published 2014-12-01

    The stiffness and the natural frequencies of a rectangular and a V-shaped micro-cantilever beams used in Atomic Force Microscope (AFM) were analysed using the Finite Element (FE) method. A determinate analysis in the material and dimensional parameters was first carried out to compare with published...

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