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    High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process

    High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process by Ke Zhang, Yunchu Yu, Nanfei Zhu, Senlin Zhang, Jie Sun, Shijin Ding, David Wei Zhang

    Published 2025-06-01

    Silicon photonics has emerged as critical for advancing photonic integrated circuits (PICs), but waveguide losses, primarily resulting from sidewall roughness, remain a primary challenge. In this work, we demonstrate a tri-layer hard mask etching process that produces strip silicon waveguides with p...

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