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    Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance

    Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance by Esmaeil Afshari, Samer Houri, Rik Verplancke, Veronique Rochus, Maarten Cauwe, Pieter Gijsenbergh, Maaike Op de Beeck

    Published 2025-06-01
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