Search Results - M. V. Labanok
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Temperature Dependence of 3С-SiC Growth During Rapid Vacuum Thermal Silicon Treatment by M. V. Labanok, P. I. Gaiduk
Published 2023-08-01The paper presents the results of a study of the structure, phase composition, and growth kinetics of silicon carbide epitaxial layers on silicon substrates during their rapid vacuum thermal treatment. Transmission electron microscopy revealed the formation of layers of the cubic polytype SiC (3C-Si...
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Formation of SiC by Vacuum Carbidization on Porous Silicon by M. V. Labanok, S. L. Prakopyeu, S. A. Zavatski, V. P. Bondarenko, P. I. Gaiduk
Published 2022-10-01Planar-view TEM investigation revealed the formation of cubic silicon carbide layers on porous silicon by vacuum carbidization. The formation of cubic silicon layers in the form of a two-phase system was found. At the same time, the formed SiC layers on the mesoporous buffer layer are predominantly...
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