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    Electrical actuation of single-crystal diamond MEMS resonators at high temperatures

    Electrical actuation of single-crystal diamond MEMS resonators at high temperatures by Zilong Zhang, Keyun Gu, Guo Chen, Masataka Imura, Meiyong Liao

    Published 2024-12-01

    Achieving efficient low-voltage actuation of microelectromechanical system (MEMS) resonators in high-temperature environments poses a difficult topic due to the thermal interference and the risk of high-temperature failure. In this work, the single-crystal diamond (SCD) resonators fabricated through...

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