Search Results - Junbo Liu

Dichroic filters with the hexagonal lattice of circular holes are used as fundamental devices for frequency selection from the infrared to the terahertz (THz) region. In the fabrication of such a high-density periodic array by the contact-mode photolithography, the depth of focus (DOF) turns out to...

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A nano-focusing and leveling system (FLS) based on improved phase analysis is proposed to measure the wafer height in lithography. Different from traditional methods, this paper applies a grating-based mark to conduct the measurement according to the principle of the Moiré effect. The pha...

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In this paper, a method of dose-modulated maskless lithography (DMML) with high efficiency for the fabrication of a special compound-eyes array with enlarged field-of-view is proposed. Before the fabrication process, practical measurements were primarily conducted to quantify the dose-modulated effe...

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Inverse lithography technology (ILT) based on the gradient descent (GD) algorithm, which is a classical local optimal method, can effectively improve the lithographic imaging fidelity. However, due to the low-pass filtering effect of the lithography imaging system, GD, although able to converge quic...

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In recent times, Gold nanoparticles (AuNPs) synthesized from plant extracts and their anticancer activity have attracted significant attention. We report the green approach for the synthesis of AuNPs using extract from Abies spectabilis plant. In this study, the reaction parameters were optimized to...

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In this study, cold deposition-based high-temperature fused deposition modeling 3D printing followed by coated tool machining were employed to process CFRP samples. The types of coated tools, their microstructures, properties, as well as the surface conditions, morphologies, and properties of the ma...

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