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    Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy

    Investigation on fabrication of silicon nanopores using an electrochemical passivation etch-stop strategy by Hao Hong, Xin Lei, Jiangtao Wei, Wenjun Tang, Minjie Ye, Jianwen Sun, Guoqi Zhang, Pasqualina M. Sarro, Zewen Liu

    Published 2025-06-01
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