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    OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES

    OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES by I. A. Ivanov, A. G. Slutsky, V. A. Sheinert, E. V. Kovalevich, V. N. Khlebtsevich

    Published 2018-07-01
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