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    Characterization of ion track-etched conical nanopores in thermal and PECVD SiO2 using small angle X-ray scattering 著者: Shankar Dutt, Rudradeep Chakraborty, Christian Notthoff, Pablo Mota-Santiago, Christina Trautmann, Patrick Kluth

    出版事項 2025-06-01

    Conical nanopores in amorphous SiO2 thin films fabricated using the ion track etching technique show promising potential for filtration, sensing, and nanofluidic applications. The characterization of the pore morphology and size distribution, along with its dependence on the material properties and...

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