Search Results - Akira Uedono

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    Impacts of homoepitaxial AlN thickness on the qualities of AlGaN QWs fabricated on the face-to-face annealed sputter-deposited AlN templates

    Impacts of homoepitaxial AlN thickness on the qualities of AlGaN QWs fabricated on the face-to-face annealed sputter-deposited AlN templates by Ryota Akaike, Kenjiro Uesugi, Kohei Shima, Shigefusa F. Chichibu, Akira Uedono, Takao Nakamura, Hideto Miyake

    Published 2025-01-01
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    Material-Mechanistic Interplay in SiCN Wafer Bonding for 3D Integration

    Material-Mechanistic Interplay in SiCN Wafer Bonding for 3D Integration by Hayato Kitagawa, Ryosuke Sato, Sodai Ebiko, Atsushi Nagata, Chiwoo Ahn, Yeounsoo Kim, Jiho Kang, Akira Uedono, Fumihiro Inoue

    Published 2025-06-01
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